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|hSʯӢƷ޹˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95% ҹ˾1998꣬ʯӢƷaнλҪaƷʯӢܡʯӢpʯӢʯӢ׹ܡʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢʯӢܡʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ ʯӢܰNҎ(gu)͸UV⾀ʯӢܼpʯӢܣֱ2-180mmں񷶇0.5-8mmL10-3000mmBʯӢܡÓuV⾀oͨB۹SiO2_99.6%׺γߴ硢W(wn)᷀(wn)ԡ׃ԺͿ܃(yu)W͸^_93%Óuu10ppm^Óuu_5ppmmڸ߉cuȵuaƷ;׹֮¹ˇaƷıڰl(f)ӟhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴͸^253.7nmҲL⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț; ʯӢƷʯӢʯӢݚʯӢ׹ʯӢˮʯӢƬʯӢ塢ʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀Nɫ͸Ͳ͸ʯӢܡʯӢ׹ֱ8-120mm֮gІ_p_ڡA^ƽ^κ͔Uڡs߅ĥɰȼӹ͸ߜ͸g͸Ժüc,VʹڡˮOӟܡˮ̎uȮaƷͭh(hun)l(wi)IʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëMŚ⣬͸ߜأ͸ԺҪJCJDH1-H7_͸߉cuȮaƷ; ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚C\gĹ̻gӡˢͰbӹI(y)ѽõVãͳʯӢ⾀ϵÇMg_l(f)®aƷЧY·fLrܮaL253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)gҎ(gu)ָ˵Ҫ ҂ĮaƷ|_˳Ҏ(gu)ҿԞ͑MЁDϼӹ ҏSĮaƷ60N󲿷և20Һ͵؅^(q)S\ź|пƼ(chung)l(f)չ҂÷dzŬȥM͑҂ø|̓rĮaƷ҂Ŀ͑׌҂Ŀ͑ڸЈϾиĸ

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